Self-assembly of block copolymers on lithographically patterned template with ordered posts

文献信息

发布日期 2015-11-03
DOI 10.1039/C5CP05449D
影响因子 3.676
作者

Dan Xu, Yao-Hong Xue, Yan-Bo Sun


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摘要

Dissipative particle dynamics simulations are employed to study the self-assembly of block copolymers on a template modified with ordered posts. Templates with hexagonally arranged and rectangularly arranged posts are both studied. For the systems with hexagonally arranged posts, morphologies with bending alignments are seen most often. We find that the different kinds of patterns, which can be directly observed in experiments, are substantially induced by the pattern of the bottom layer. In the simulations with a template modified with rectangularly arranged posts, by finely adjusting the distances between neighboring posts in both x and y directions, mesh-shaped structures with different angles between the bottom and the sub-bottom layers can be obtained. These results shed light on the better design of lithographically patterned materials on the scale of 10 nm via the directed self-assembly of BCPs by templating.

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来源期刊

Physical Chemistry Chemical Physics

Physical Chemistry Chemical Physics
CiteScore: 5.5
自引率: 10.3%
年发文量: 3036

Physical Chemistry Chemical Physics (PCCP) is an international journal co-owned by 19 physical chemistry and physics societies from around the world. This journal publishes original, cutting-edge research in physical chemistry, chemical physics and biophysical chemistry. To be suitable for publication in PCCP, articles must include significant innovation and/or insight into physical chemistry; this is the most important criterion that reviewers and Editors will judge against when evaluating submissions. The journal has a broad scope and welcomes contributions spanning experiment, theory, computation and data science. Topical coverage includes spectroscopy, dynamics, kinetics, statistical mechanics, thermodynamics, electrochemistry, catalysis, surface science, quantum mechanics, quantum computing and machine learning. Interdisciplinary research areas such as polymers and soft matter, materials, nanoscience, energy, surfaces/interfaces, and biophysical chemistry are welcomed if they demonstrate significant innovation and/or insight into physical chemistry. Joined experimental/theoretical studies are particularly appreciated when complementary and based on up-to-date approaches.

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